A galvanometer based laser dynamic focusing system
Dynamic,Optical,Precision,Scanning
Dynamic,Optical,Precision,Scanning
Actuator,Control,Mechatronic,Motion
Algorithm,Control,Learning,Modelling
Control,Piezo-electric,Positioning,Ultra-precision
Learning,Mechatronic,Piezo-electric,Ultra-precision
Assembly,Diagnostics,Quality assurance,Vibration
Anomaly,Diagnostics,Learning,Maintenance
Control,Identification,Mechatronic,Thermal error
Identification,Mechatronic,Motion,Wafer