Multivariable performance analysis of position-controlled payloads with flexible eigenmodes
Analysis,Control,Feedback,Performance
Modeling and feedforward control for high performance galvanometer scanners
Control,Dynamic,Mechatronic,Modelling
Advanced Identification and Control: Thermodynamics in precision mechatronics
Control,Identification,Mechatronic,Thermal error
Position domain collaborative control with multirate sampling for a laser scanner-stage system
Control,Laser micro machining,Positioning,Servosystem
A Multivariable Experiment Design Framework for Accurate FRF Identification of Complex Systems
Identification,Mechatronic,Motion,Wafer
Development of a real-time auto focus microscope system for micro-stereolithography
Image,Laser micro machining,Microscope,Stereolithography
A galvanometer based laser dynamic focusing system
Dynamic,Optical,Precision,Scanning