The turbulent history of interferometric methods of precision positioning
Distance,Interferometry,Measurement,Motion
Distance,Interferometry,Measurement,Motion
Actuator,Algorithm,Control,Damping
Control,Mechatronic,Motion,Neural network
Control,Identification,Mechatronic,Motion
Identification,Mechatronic,Motion,Neural network
Interferometry,Measurement,Motion,Vibration
Actuator,Control,Mechatronic,Optimisation
Identification,Mechatronic,Precision,Structural analysis
Control,Model,Piezo-electric,Positioning