SIG : PMSC

|SIG : PMSC

Vibration suppression of a state-of-the-art wafer gripper

A compliant continuously variable transmission mechanism

The Fastjack – A robust, UHV compatible and high performance linear actuator

Actuator,Interferometry,Piezo-electric,Vacuum

Acceleration feedback control in fast tool servo freeform machining

Computer numerical control (CNC),Cutting,Dynamic,Stiffness

Measurement-based loop shaping approach of feedback control for high performance direct drives incorporating friction behaviour of guides

Bearing,Control,Friction,Stiffness

Capability verification of the measurement with a large-range nanopositioning stage

Measurement,Metrology,Nano technology

Universal Adjustment Platform – standardization of 6 degrees of freedom adjustment systems design and integration

Actuator,Alignment,Motion,Positioning

Cost-Effective High-Precision Magnetically Levitated Positioning Stage Technology

Control,Interferometry,Mechatronic,Servosystem

State space controller for actuator control of an active jerk decoupled feed drive

Actuator,Control,Drive,Vibration

Zero dynamics, zero errors, zero compromise, with application to medical X-ray systems

Accuracy,Control,Motion,Speed

Translate »