Design, installation and verification of Mogno beamline nano station metrology system in LNLS/Sirius
Design;Metrology;Spindle;Verification
Design;Metrology;Spindle;Verification
Dimensional;Interferometry;Metrology;Nano technology
Control;Intelligent;Manipulator
Adaptive control;Control;Mechatronic;Stability
Conceptual design;Control;Coordination;Kinematic
Coordination;Motion;Precision;Scanning
Control;Drive;Motion;Precision