A New Vision-Based System with Nanometer Resolution over Millimetric Ranges for Measuring the 6-DoF of Positioning Stages
Holography;Measuring instrument;Robot
FEM model of a precision spindle for simulating manufacturing and assembly errors
Bearing;Finite element method (FEM);Modelling;Precision;Spindle
Reference Position of a 2D Positioning Platform with Halbach Linear Motors
Nano technology;Positioning
Model based Diagnostic and Monitoring of Mechatronic Tilting Devices in a highly complex modular system
Actuator;Diagnostics;Model;Monitoring
Mixed H2/H? Controller Optimization for a Gravitational Wave Telescope
Design method;Dynamic;Optimisation;Ultra-precision
Modal Identification for Multivariable Motion Systems
Estimating;Identification;Mechatronic;Modelling
High precision feed forward control of piezo-electric actuators
Actuator;Control;Modelling;Piezo-electric
Experimental Evaluation of Ultra Hard Mount Vibration Control Systems
Control;Mechatronic;Piezo-electric;Vibration