Control and Operation Software Architecture for the New Microtomography Experimental Station at SIRIUS
Conceptual design;Control;Coordination;Kinematic
Conceptual design;Control;Coordination;Kinematic
Actuator;Control;Identification;Mechatronic
Diagnostics;Maintenance;Monitoring;Observer
Control;Finite element method (FEM);Optimisation;Thermal error
Accuracy;Algorithm;Control;Optimisation
Design;Metrology;Spindle;Verification
Dimensional;Interferometry;Metrology;Nano technology