Experimental investigation of air bearing noise by means of a 3D nanopositioning system
Accuracy;Bearing;Interferometry;Positioning
Aligning an Hard X-Ray Cavity Conceptual Design for High-Precision Four Degrees of Freedom Optomechanics
Mechanism;Ultra-precision;Vacuum;X-ray
Application of MBSE and AI for developing a 3D printing system
Artificial intelligence;Design method;Methodology;Model
Roll-to-Roll web handling system for on-roll patterning maskless lithography process
Control;Design;In-process measurement;Roll
A New Vision-Based System with Nanometer Resolution over Millimetric Ranges for Measuring the 6-DoF of Positioning Stages
Holography;Measuring instrument;Robot
FEM model of a precision spindle for simulating manufacturing and assembly errors
Bearing;Finite element method (FEM);Modelling;Precision;Spindle
Reference Position of a 2D Positioning Platform with Halbach Linear Motors
Nano technology;Positioning
Model based Diagnostic and Monitoring of Mechatronic Tilting Devices in a highly complex modular system
Actuator;Diagnostics;Model;Monitoring
Mixed H2/H? Controller Optimization for a Gravitational Wave Telescope
Design method;Dynamic;Optimisation;Ultra-precision
Modal Identification for Multivariable Motion Systems
Estimating;Identification;Mechatronic;Modelling