NPS6D200 – Realization of high precision long stroke vertical actuation in conjunction with a planar direct drive
Drive;Mechatronic;Positioning;Ultra-precision
Drive;Mechatronic;Positioning;Ultra-precision
Actuator;Control;Identification;Mechatronic
Accuracy;Bearing;Interferometry;Positioning
Mechanism;Ultra-precision;Vacuum;X-ray
Artificial intelligence;Design method;Methodology;Model
Control;Design;In-process measurement;Roll
Holography;Measuring instrument;Robot
Bearing;Finite element method (FEM);Modelling;Precision;Spindle
Nano technology;Positioning
Actuator;Diagnostics;Model;Monitoring