Identification and Control of Overactuated Mechatronic Systems
Control;Motion;Precision;Structural analysis
Control;Motion;Precision;Structural analysis
Drive;Mechatronic;Positioning;Ultra-precision
Coordination;Motion;Precision;Scanning
Control;Drive;Motion;Precision
Control;Mechatronic;Stability;Ultra-precision
Accuracy;Bearing;Interferometry;Positioning
Mechanism;Ultra-precision;Vacuum;X-ray
Artificial intelligence;Design method;Methodology;Model
Control;Design;In-process measurement;Roll
Holography;Measuring instrument;Robot