Frame deformations control based on reduced order thermo-elastic models
Control;Finite element method (FEM);Optimisation;Thermal error
Control;Finite element method (FEM);Optimisation;Thermal error
Accuracy;Algorithm;Control;Optimisation
Design;Metrology;Spindle;Verification
Dimensional;Interferometry;Metrology;Nano technology
Control;Intelligent;Manipulator
Control;Motion;Precision;Structural analysis
Drive;Mechatronic;Positioning;Ultra-precision
Actuator;Control;Identification;Mechatronic
Diagnostics;Maintenance;Monitoring;Observer