NPS6D200 – Realization of high precision long stroke vertical actuation in conjunction with a planar direct drive
Drive;Mechatronic;Positioning;Ultra-precision
Drive;Mechatronic;Positioning;Ultra-precision
Actuator;Control;Identification;Mechatronic
Diagnostics;Maintenance;Monitoring;Observer
Control;Finite element method (FEM);Optimisation;Thermal error
Accuracy;Algorithm;Control;Optimisation
Dimensional;Interferometry;Metrology;Nano technology