On the development and qualification of multiaxial designs of nanofabrication machines with ultra precision tool rotations
Coordinate measuring machine (CMM),Design method,Finite element method (FEM),Nano manufacturing
Coordinate measuring machine (CMM),Design method,Finite element method (FEM),Nano manufacturing
Finite element method (FEM),Mechanism,Turning,Ultra-precision
Interferometry,Measurement,Measuring instrument,Metrology
Diamond,Grinding,Ultra-precision,Wear
Control,Learning,Optimisation
Coating,Grinding,Micromachining,Super abrasive
Calibration,Coordinate measuring machine (CMM),Metrology