Uploaded: 6th June 2019
AuthorRalf Schienbein, Florian Fern, René Theska, Roland FüßlCoordinate measuring machine (CMM),Design method,Finite element method (FEM),Nano manufacturing
Download FileOn the development and qualification of multiaxial designs of nanofabrication machines with ultra precision tool rotations
Home|On the development and qualification of multiaxial designs of nanofabrication machines with ultra precision tool rotations