TU Ilmenau

|TU Ilmenau

Comparison of single-beam and dual-beam differential interferometry for motion measurements in noisy environments

Interferometry,Measurement,Motion,Vibration

Ultrastable, traceable optical frequencies for length metrology in long-range nanopositioning and nanomeasuring machines

Interferometry,Laser,Stability,Ultra-precision

Behaviour of porous aerostatic bearings with various restrictor permeabilities

Bearing,Flow,Pressure

Feedback control of thermal systems using heat flux sensors

Nanopositioning and Nanomeasuring Machine NPMM-200 – sub-nanometre resolution and highest accuracy in extended macroscopic working areas

Scanning strategies for long term and long distance AFM measurements

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