First prototype of a positioning device with subatomic resolution
Mechanism,Metrology,Microstructure,Positioning
Model-based determination of the reproducibility of kinematic couplings
Modelling,Nano manufacturing,Precision,Tool
Investigations on a torque-compensating adjustment drive for mechanically sensitive devices
Assembly,Drive,Metrology,Precision
Adjustable stiffness compensation for monolithic high-precision mechanisms
Compensation,Finite element method (FEM),Mechanism,Stiffness
Traceable 5D-nanofabrication with nano positioning and nano measuring machines
Metrology,Nano manufacturing,Stamping,Ultra-precision
Investigations on low-friction kinematic couplings based on compliant mechanisms
Kinematic,Mechanism,Tool,Vacuum
Torque-compensating adjustment drive for mechanically sensitive devices
Assembly,Measuring instrument,Mechanism
On the development of five-axes nanopositioning machines for measurement and fabrication purposes based on Cartesian systems
Coordinate measuring machine (CMM),Design method,Finite element method (FEM),Ultra-precision
Corner loading and its influence on the tilt sensitivity of precision weighing cells
Error,Finite element method (FEM),Measuring instrument,Mechanism
Investigations on kinematic couplings for tool-changing interfaces in highest-precision devices
Kinematic,Measurement,Tool,Ultra-precision