Conceptional design of a positioning device with subatomic resolution and reproducibility
Linear,Mechanism,Metrology,Silicon
Wireless actuation within hermetically enclosed precision systems
Actuator,Positioning,Precision,Vacuum
Mechanical properties of an adjustable weighing cell prototype
Mechanism,Mechatronic,Resolution,Stiffness
Measuring setup for the investigation of the reproducibility of tool changing interfaces for high-precision devices
Kinematic,Measurement,Nano manufacturing,Tool
Investigations of different compliant manipulator concepts for a high-precise rotational motion
Accuracy,Design method,Mechanism,Strain
On precise modelling of very thin flexure hinges
Experimentation,Finite element method (FEM),Modelling,Stiffness
Investigations of the geometrical scaling in the systematic synthesis of compliant mechanisms
Mechanism,Motion,Synthesis,Ultra-precision