First prototype of a positioning device with subatomic resolution
Mechanism,Metrology,Microstructure,Positioning
Mechanism,Metrology,Microstructure,Positioning
Modelling,Nano manufacturing,Precision,Tool
Assembly,Drive,Metrology,Precision
Compensation,Finite element method (FEM),Mechanism,Stiffness
Metrology,Nano manufacturing,Stamping,Ultra-precision
Kinematic,Mechanism,Tool,Vacuum
Assembly,Measuring instrument,Mechanism
Coordinate measuring machine (CMM),Design method,Finite element method (FEM),Ultra-precision
Error,Finite element method (FEM),Measuring instrument,Mechanism
Kinematic,Measurement,Tool,Ultra-precision