In-situ fine adjustment system for in-vacuo weighing cells
Alignment;Measuring instrument;Mechatronic;Vacuum
Impact of higher-order surface imperfections on the stiffness of flexure hinges
Finite element method (FEM);Mechanism;Stiffness;Surface;Topography
Orientation-dependent behavior of miniaturized compliant mechanism for high-precision force sensors
Alignment;Force;Mechanism;Stiffness
Tip- and laser- based micro and nanofabrication in extended areas on flat and non-flat surfaces
Atomic force microscopy (AFM),Interferometry,Nano manufacturing,Ultra-precision
Investigating the kinematic performance of a positioning device with subatomic resolution
Kinematic,Mechanism,Modelling,Positioning
Characterization of micro spheres through AFM surface scans
Atomic force microscopy (AFM),Coordinate measuring machine (CMM),Radius
Modeling of very thin flexure hinges considering surface topography
Finite element method (FEM),Mechanism,Stiffness,Surface
Highly reproducible force application for a tool-changing system in nanofabrication machines
Force,Nano manufacturing,Precision,Tool
Investigation of the sensitivity of a high-precision weighing cell to disturbances caused by the adjustment system
Emission,Measuring instrument,Thermal error,Uncertainty