Tip- and laser- based micro and nanofabrication in extended areas on flat and non-flat surfaces
Atomic force microscopy (AFM),Interferometry,Nano manufacturing,Ultra-precision
Investigating the kinematic performance of a positioning device with subatomic resolution
Kinematic,Mechanism,Modelling,Positioning
Characterization of micro spheres through AFM surface scans
Atomic force microscopy (AFM),Coordinate measuring machine (CMM),Radius
Modeling of very thin flexure hinges considering surface topography
Finite element method (FEM),Mechanism,Stiffness,Surface
Highly reproducible force application for a tool-changing system in nanofabrication machines
Force,Nano manufacturing,Precision,Tool
Investigation of the sensitivity of a high-precision weighing cell to disturbances caused by the adjustment system
Emission,Measuring instrument,Thermal error,Uncertainty
First prototype of a positioning device with subatomic resolution
Mechanism,Metrology,Microstructure,Positioning
Model-based determination of the reproducibility of kinematic couplings
Modelling,Nano manufacturing,Precision,Tool
Investigations on a torque-compensating adjustment drive for mechanically sensitive devices
Assembly,Drive,Metrology,Precision