Technische Universität Ilmenau

|Technische Universität Ilmenau

First prototype of a positioning device with subatomic resolution


Model-based determination of the reproducibility of kinematic couplings

Modelling,Nano manufacturing,Precision,Tool

Investigations on a torque-compensating adjustment drive for mechanically sensitive devices


Adjustable stiffness compensation for monolithic high-precision mechanisms

Compensation,Finite element method (FEM),Mechanism,Stiffness

Traceable 5D-nanofabrication with nano positioning and nano measuring machines

Metrology,Nano manufacturing,Stamping,Ultra-precision

Investigations on low-friction kinematic couplings based on compliant mechanisms


Torque-compensating adjustment drive for mechanically sensitive devices

Assembly,Measuring instrument,Mechanism

On the development of five-axes nanopositioning machines for measurement and fabrication purposes based on Cartesian systems

Coordinate measuring machine (CMM),Design method,Finite element method (FEM),Ultra-precision

Corner loading and its influence on the tilt sensitivity of precision weighing cells

Error,Finite element method (FEM),Measuring instrument,Mechanism

Investigations on kinematic couplings for tool-changing interfaces in highest-precision devices


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