Technische Universität Ilmenau

|Technische Universität Ilmenau

In-situ fine adjustment system for in-vacuo weighing cells

Alignment;Measuring instrument;Mechatronic;Vacuum

Impact of higher-order surface imperfections on the stiffness of flexure hinges

Finite element method (FEM);Mechanism;Stiffness;Surface;Topography

Orientation-dependent behavior of miniaturized compliant mechanism for high-precision force sensors


Amorphous silicon carbide as platform for DOEs with high and variable refractive index

Tip- and laser- based micro and nanofabrication in extended areas on flat and non-flat surfaces

Atomic force microscopy (AFM),Interferometry,Nano manufacturing,Ultra-precision

Investigating the kinematic performance of a positioning device with subatomic resolution


Characterization of micro spheres through AFM surface scans

Atomic force microscopy (AFM),Coordinate measuring machine (CMM),Radius

Modeling of very thin flexure hinges considering surface topography

Finite element method (FEM),Mechanism,Stiffness,Surface

Highly reproducible force application for a tool-changing system in nanofabrication machines

Force,Nano manufacturing,Precision,Tool

Investigation of the sensitivity of a high-precision weighing cell to disturbances caused by the adjustment system

Emission,Measuring instrument,Thermal error,Uncertainty

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