Technische Universität Ilmenau

|Technische Universität Ilmenau

Novel in-situ fine adjustment system with contactless energy transfer

Actuator;Mechatronic;Piezo-electric;Positioning

Reduction of the bending-torsion-stiffness ratio of flexure hinges based on stress-strain state transition

Bending;Stiffness;Strain;Stress

High-precision force sensor for directly SI-traceable and orientation-independent measurements

Force;Precision;Sensor;Stiffness

In-situ fine adjustment system for in-vacuo weighing cells

Alignment;Measuring instrument;Mechatronic;Vacuum

Impact of higher-order surface imperfections on the stiffness of flexure hinges

Finite element method (FEM);Mechanism;Stiffness;Surface;Topography

Orientation-dependent behavior of miniaturized compliant mechanism for high-precision force sensors

Alignment;Force;Mechanism;Stiffness

Amorphous silicon carbide as platform for DOEs with high and variable refractive index

Tip- and laser- based micro and nanofabrication in extended areas on flat and non-flat surfaces

Atomic force microscopy (AFM),Interferometry,Nano manufacturing,Ultra-precision

Investigating the kinematic performance of a positioning device with subatomic resolution

Kinematic,Mechanism,Modelling,Positioning

Characterization of micro spheres through AFM surface scans

Atomic force microscopy (AFM),Coordinate measuring machine (CMM),Radius

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