Novel in-situ fine adjustment system with contactless energy transfer
Actuator;Mechatronic;Piezo-electric;Positioning
Actuator;Mechatronic;Piezo-electric;Positioning
Bending;Stiffness;Strain;Stress
Force;Precision;Sensor;Stiffness
Alignment;Measuring instrument;Mechatronic;Vacuum
Finite element method (FEM);Mechanism;Stiffness;Surface;Topography
Alignment;Force;Mechanism;Stiffness
Atomic force microscopy (AFM),Interferometry,Nano manufacturing,Ultra-precision
Kinematic,Mechanism,Modelling,Positioning
Atomic force microscopy (AFM),Coordinate measuring machine (CMM),Radius