In-situ fine adjustment system for in-vacuo weighing cells
Alignment;Measuring instrument;Mechatronic;Vacuum
Alignment;Measuring instrument;Mechatronic;Vacuum
Finite element method (FEM);Mechanism;Stiffness;Surface;Topography
Alignment;Force;Mechanism;Stiffness
Atomic force microscopy (AFM),Interferometry,Nano manufacturing,Ultra-precision
Kinematic,Mechanism,Modelling,Positioning
Atomic force microscopy (AFM),Coordinate measuring machine (CMM),Radius
Finite element method (FEM),Mechanism,Stiffness,Surface
Force,Nano manufacturing,Precision,Tool
Emission,Measuring instrument,Thermal error,Uncertainty