Conceptional design of a positioning device with subatomic resolution and reproducibility
Linear,Mechanism,Metrology,Silicon
Linear,Mechanism,Metrology,Silicon
Actuator,Positioning,Precision,Vacuum
Mechanism,Mechatronic,Resolution,Stiffness
Kinematic,Measurement,Nano manufacturing,Tool
Accuracy,Design method,Mechanism,Strain
Experimentation,Finite element method (FEM),Modelling,Stiffness
Mechanism,Motion,Synthesis,Ultra-precision