Design of Piezo-Flexure stage for Machining error compensation
Actuator,Machining,Piezo-electric,Precision
Actuator,Machining,Piezo-electric,Precision
Damping,Design method,Dynamic,Mechatronic
Accuracy,Design method,Mechanism,Strain
Actuator,Control,Design,Vibration
Composite,Drilling,Machining,Surface
Compensation,Positioning,Precision,Vibration