Design and Control of a 3-DOF Reaction Force Compensation Mechanism for Precision Stage

Uploaded: 5th June 2018

AuthorHyoyoung Kim,Chang-hoon Seo,Moongu Lee,JaeHoon Jo,Taegon Kim,Cheolho Kim,Sung Bok Kang,Seokwoo Lee

Compensation,Positioning,Precision,Vibration

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