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Thermal Error Reduction in Metrology & Control for Semi-Conductors
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Thermal Error Reduction in Metrology & Control for Semi-Conductors
Thermal Design and Dimensional Drift
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David Billington
2020-04-29T15:04:45+00:00
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Passive cooling of precision measuring equipment by means of latent heat
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David Billington
2020-04-29T15:04:45+00:00
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Counteracting thermal issues in EUV-Lithography using an adaptive optics system
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David Billington
2020-04-29T15:04:46+00:00
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Thermal Fluid-Structure Analysis of an optical Device including Radiation and Conduction
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David Billington
2020-04-29T15:04:46+00:00
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Advanced Thermal Control Consortium
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David Billington
2020-04-29T15:04:47+00:00
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Thermal Error Reduction by Topology Optimization
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David Billington
2020-04-29T15:04:47+00:00
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