Microfabrication of a biomimetic ciliary propulsion system via soft lithography
Actuator,Miniaturization,Molding (or Moulding),Wafer
Actuator,Miniaturization,Molding (or Moulding),Wafer
Injection,Molding (or Moulding),Ultrasonic
Fixture,Flexibility,Measurement,Micromachining
Actuator,Gear,Miniaturization,Nano technology
Atomic force microscopy (AFM),Coating,Mold (or Mould),Physical vapor deposition (PVD)
3D printing,Microstructure,Precision