lateral scanning white-light interferometry with integrated displacement measurements using laser speckles
Interferometry,Metrology,Topography
Interferometry,Metrology,Topography
Atomic force microscopy (AFM),Coordinate measuring machine (CMM),Measuring instrument
Calibration,Digital,Metrology
Accuracy,Manufacturing,Metrology
Parameter,Profile,Surface,Texture
Analysis,Casting,Metrology,Surface
Bearing,Measurement,Metrology,Spindle