A compact zero-angle mirror alignment method based on range-resolved interferometry
Measurement,Measuring instrument
Unconventional, lateral measurements with laser focus sensors for nanopositioning stages
Dimensional,Laser,Measuring instrument,Positioning
Unconventional, lateral measurements with laser focus sensors for nanopositioning stages
Dimensional,Laser,Measuring instrument,Positioning
Precision-driven Surface Segmentation via Neural Networks
Artificial intelligence,Metrology,Surface
A compact zero-angle mirror alignment method based on range-resolved interferometry
Measurement,Measuring instrument
A novel multi-axis position sensor is validated to nanometre accuracy and demonstrates picometre/nanoradian potential
Interferometry,Metrology,Positioning,Precision
Surface and shape measurement solution integrated in laser machine for the characterization of round parts
Accuracy,Algorithm,Calibration,In-process measurement,Laser micro machining,Surface
Towards a general framework for measurement uncertainty estimation with any complex surface topography
Accuracy,Optical,Surface,Uncertainty