A compact zero-angle mirror alignment method based on range-resolved interferometry
Measurement,Measuring instrument
Measurement,Measuring instrument
Dimensional,Laser,Measuring instrument,Positioning
Artificial intelligence,Metrology,Surface
Measurement,Measuring instrument
Dimensional,Laser,Measuring instrument,Positioning
Interferometry,Metrology,Positioning,Precision
Accuracy,Algorithm,Calibration,In-process measurement,Laser micro machining,Surface
Accuracy,Optical,Surface,Uncertainty