Optimization of fast tool servo diamond turning for enhancing geometrical accuracy and surface quality of freeform optics
Micromachining,Microstructure,Optimisation,Turning
Micromachining,Microstructure,Optimisation,Turning
Diamond,Micromachining,Tool,Ultra-precision
Diamond,Machining,Precision,Tool
Diamond,Micromachining,Ultra-precision
Machining,Microstructure,Optical,Ultra-precision
Dressing,Grinding,Micromachining,Tool
Finite element method (FEM),Micromachining,Spindle,Vibration
Accuracy,Calcium fluoride,Coating,Micromachining,Ultra-precision
Algorithm,Deformation,Lapping,Residual stress