Mu- Investigation on SurfaceSubsurface Damage Mechanism in Yttrium Aluminum Garnet Crystal Lapping and Polishing
Accuracy,Anisotropy,Nano indentation,Polishing
Accuracy,Anisotropy,Nano indentation,Polishing
Cutting,Grooving,Mechanical,Ultra-precision
Alloy,Modelling,Nano manufacturing,Simulation
Flatness,Lapping,Residual stress,Texture
Accuracy,Lapping,Measurement,Ultra-precision
Burr,Roughness,Turning,Ultra-precision
End milling,Flow,Micromachining
Control,Finishing,Manipulator,Robot