Magnetically levitated planar motion stage with atomic resolution for metrological high-speed scanning probe microscopy
Magnetic bearing,Metrology,Positioning,Scanning probe microscope (SPM)
Magnetic bearing,Metrology,Positioning,Scanning probe microscope (SPM)
Accuracy,Bearing,In-process measurement,Sensor
Accuracy,Finite element method (FEM),Machine,Tribology
Emission,Measuring instrument,Thermal error,Uncertainty
Finite element method (FEM),Micromachining,Simulation,Turbine blade
Accuracy,Measurement,Micromachining,Spindle
Coordinate measuring machine (CMM),Optical,Tooling,Uncertainty
Analysis,Computer aided design (CAD),Machine,Precision
Machine,Mechanism,Parallel,Robot