Flexible mono- and multilayer micro grinding tools for ultra-high precision processing and micro machining
Grinding,Micromachining,Tool,Ultra-precision
Grinding,Micromachining,Tool,Ultra-precision
Calibration,Compensation,Measurement,Positioning
Measuring instrument,Temperature
Measurement,Optical,Positioning,Tool
Micromachining,Spindle,Vibration
In-process measurement,Interferometry,Kinematic,Ultra-precision
Bearing,Hydrostatic,Spindle,Temperature
Coating,Finite element method (FEM),Material,Mold (or Mould)
Algorithm,Analysis,Measuring instrument,Performance
Interferometry,Measuring instrument,Production,Ultra-precision