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High Precision Mechantronics
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High Precision Mechantronics
Laser Frequency Stabilization for Aerospace Applications
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euspen
2018-04-04T14:01:15+00:00
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Lightweight 450 mm Wafer Stages Enabled by Over-actuation
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euspen
2018-04-04T14:01:23+00:00
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Mechatronic System Design of an Optical Element Curvature Actuation System
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euspen
2018-04-04T14:01:24+00:00
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Electrode Feeding Device for Micro-hole Electrical Discharge Machining by Using AZARASHI Mechanism
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euspen
2018-04-04T14:01:28+00:00
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Measurement of the Percentage Contact Area of High Precision Planar Ball Guideways
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euspen
2018-04-04T14:01:28+00:00
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Multivariable Frequency Response Function Estimation of a Micro-Milling Spindle with Active Magnetic Bearings
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euspen
2018-04-04T14:01:28+00:00
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Friction Control Using Ultrasonic Vibration for Piezoelectric Translation Apparatus
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euspen
2018-04-04T14:01:29+00:00
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First Results of an Interferometric Controlled Planar Positioning System for 100 mm with Zerodur Slider
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euspen
2018-04-04T14:01:29+00:00
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Long-range Elastic Guidance Mechanisms for Electrostatic Comb-drive Actuators
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euspen
2018-04-04T14:01:29+00:00
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High Response Fast Tool Servo for Ultraprecision Turning
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euspen
2018-04-04T14:01:29+00:00
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