High Precision Mechantronics

|High Precision Mechantronics

Laser Frequency Stabilization for Aerospace Applications

Lightweight 450 mm Wafer Stages Enabled by Over-actuation

Mechatronic System Design of an Optical Element Curvature Actuation System

Electrode Feeding Device for Micro-hole Electrical Discharge Machining by Using AZARASHI Mechanism

Measurement of the Percentage Contact Area of High Precision Planar Ball Guideways

Multivariable Frequency Response Function Estimation of a Micro-Milling Spindle with Active Magnetic Bearings

Friction Control Using Ultrasonic Vibration for Piezoelectric Translation Apparatus

First Results of an Interferometric Controlled Planar Positioning System for 100 mm with Zerodur Slider

Long-range Elastic Guidance Mechanisms for Electrostatic Comb-drive Actuators

High Response Fast Tool Servo for Ultraprecision Turning

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