31 May 2010
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Long-range Elastic Guidance Mechanisms for Electrostatic Comb-drive Actuators
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Long-range Elastic Guidance Mechanisms for Electrostatic Comb-drive Actuators
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Uploaded: 31st May 2010
AuthorA OttenAuthor, B. KrijnenAuthor, D BrouwerAuthor, H SoemersAuthor, J Engelen
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