Air bearing hexapod for motion and positioning in six degrees of freedom with sub-micrometer precision
Dynamic,Hexapod,Positioning,Precision
Dynamic,Hexapod,Positioning,Precision
Calibration,Finite element method (FEM),Nano indentation,Steel
Accuracy,Control,Cutting,Precision
Bearing,Flow,Pressure
Atomic force microscopy (AFM),Friction,Mechanism,Simulation
Automation,Milling,Monitoring,Neural network
In-process measurement,Micromachining,Ultra-precision
Nano manufacturing,Nano technology,Optical,Surface
Biomedical,Ultrasonic