Orientation-dependent behavior of miniaturized compliant mechanism for high-precision force sensors
Alignment;Force;Mechanism;Stiffness
Alignment;Force;Mechanism;Stiffness
Alignment;Coordinate measuring machine (CMM);Laser;Positioning
Design;Finite element method (FEM);Resistance;Surface
Alloy;Defect;Nickel;Ultra-precision
Cooling;Grinding;Lubrication;Microstructure
Environmental;Experimentation;Finite element method (FEM);Sensor
Damping;Precision;Ultrasonic;Vibration
Atomic force microscopy (AFM);Experimentation;Tribology
Diamond;Finishing;Laser;Polishing