New shape profiling polishing method for diffuser microstructured surface
Accuracy;Methodology;Nano manufacturing;Polishing
Accuracy;Methodology;Nano manufacturing;Polishing
Manufacturing (CAM);Material;Turning;Ultra-precision
Etching;Precision;Temperature
Modelling;Ultra-precision
Design;Mechanism;Modelling;Nonlinear
Micromachining;Microstructure;Polymer;Texture
Alignment;Measuring instrument;Mechatronic;Vacuum
Finite element method (FEM);Mechanism;Stiffness;Surface;Topography