In-situ fine adjustment system for in-vacuo weighing cells
Alignment;Measuring instrument;Mechatronic;Vacuum
Alignment;Measuring instrument;Mechatronic;Vacuum
Finite element method (FEM);Mechanism;Stiffness;Surface;Topography
Design;Finite element method (FEM);Resistance;Surface
Alloy;Defect;Nickel;Ultra-precision
Cooling;Grinding;Lubrication;Microstructure
Atomic force microscopy (AFM);Experimentation;Tribology
Diamond;Finishing;Laser;Polishing
Diamond;Turning;Ultra-precision
Environmental;Experimentation;Finite element method (FEM);Sensor