The Fastjack A robust, UHV compatible and high performance linear actuator
Actuator,Interferometry,Piezo-electric,Vacuum
Actuator,Interferometry,Piezo-electric,Vacuum
Accuracy,Micromachining,Ultra-precision
Abrasion,Finishing,Polishing,Ultra-precision
Profile,Simulation,Surface,Uncertainty
Hot stamping,Microstructure,Mold (or Mould)
Computer aided design (CAD),Manufacturing (CAM),Ultra-precision
Maintenance,Monitoring,Ultra-precision,Vibration
Spindle,Temperature,Thermal error
Fluid,Metrology,Thermal error,Workpiece
Analysis,Dynamic,Finite element method (FEM),Thermal error