Self-standing process by using bimetallic effect of thin-film metallic glass
Actuator,Alloy,Glass,Sensor
Actuator,Alloy,Glass,Sensor
Manufacturing (CAM),Material,Turning,Ultra-precision
Measurement,Measuring instrument
Actuator,Alignment,Motion,Positioning
Control,Interferometry,Mechatronic,Servosystem
Actuator,Control,Drive,Vibration
Distance,Interferometry,Measurement,Motion
Control,Model,Piezo-electric,Positioning