Progress in nanometrology: reduction of measurement uncertainty of step height and etching depth calibration down to 0.3 nm
Accuracy,Atomic force microscopy (AFM),Metrology,Nano technology
Dressing of grinding wheels for the manufacture of all-ceramic micro end mills
Dressing,Grinding,Micromachining,Tool
Nanoscale mass measurement
Accuracy,Calibration,Measurement,Uncertainty
Effects of single and binary fillers of hexagonal and cubic boron nitride in polyurethane foam
Mechanical,Nano manufacturing,Polymer,Tensile
Simulation-based investigation of the interaction between tool and workpiece in grinding with micro pencil grinding tools
Finite element method (FEM),Micromachining,Spindle,Vibration
Optical roughness measurements with robot-assisted part inclination compensation
Compensation,Optical,Robot,Roughness
Rapid evaluation for dynamics of machine tools based on improved reduced order models
Dynamic,Evaluation,Machine,Modelling
High-Precision Parallel Kinematic Tip/Tilt Mirror with huge Motion Range
Kinematic,Parallel,Precision
Improving form accuracy in ultra-precision machining of calcium fluoride by integrating vibration-assisted cutting and coating technology
Accuracy,Calcium fluoride,Coating,Micromachining,Ultra-precision