Levitation estimation using electrical characteristics of levitation actuator with stacked piezoelectric element
Actuator;Friction;Mechatronic;Piezo-electric
Energy-saving tool path generation for NC machine tools by model based simulation of feed drive system
Manufacturing (CAM);Ecology;Numerical control (NC);Simulation
Iterative learning control for nano-positioning stage of defect imaging equipment
Control;Performance;Positioning;Ultra-precision
Real-time motion error compensation in optical surface fabrication using a 2-DOF linear encoder
Compensation;In-process measurement;Micromachining;Optical
Mechanical machining of a NiMnGa alloy with magnetic shape memory effect
Actuator;Cutting;Finishing;Grinding
High-efficiency fabrication of functional structured array surfaces on metallic ceramic materials by a novel magnetic field-assisted self-assembly electrode
Ceramic;Electrical discharge machining (EDM);Electrode;Machining
In-situ fine adjustment system for in-vacuo weighing cells
Alignment;Measuring instrument;Mechatronic;Vacuum
Tool wear in drilling using cutting fluid diluted with alkaline aqueous solutions
Drilling;Fluid;Tool;Wear
Impact of higher-order surface imperfections on the stiffness of flexure hinges
Finite element method (FEM);Mechanism;Stiffness;Surface;Topography