Simultaneous nonlinear feedback and linear feedforward control design for high-performance motion control of machines for semiconductor manufacturing

Uploaded: 27th August 2025

Author: Dragan Kosti?, Luke Van Eijk, Mojtaba Haghi, Wout Laarakkers, Jasper Gerritsen, Thom Samuels, Kai Wa Yan, Guido Knippels, Gary Widdowson

Accuracy;Algorithm;Computer automated;Control

Download File