Uploaded: 3rd June 2019
AuthorGabor Molnar, Rudolf Meeß, Jens Flügge, Christian Werner, Sebastian Bütefisch, Hans-Ulrich Danzebrink, Liang YuDiamond,Grinding,Ultra-precision,Wear
Download FileMicro Coordinate Measurement Machine using voice coil actuator with interferometric position feedback
Home|Micro Coordinate Measurement Machine using voice coil actuator with interferometric position feedback