The Fastjack A robust, UHV compatible and high performance linear actuator
Actuator,Interferometry,Piezo-electric,Vacuum
Acceleration feedback control in fast tool servo freeform machining
Computer numerical control (CNC),Cutting,Dynamic,Stiffness
Capability verification of the measurement with a large-range nanopositioning stage
Measurement,Metrology,Nano technology
Universal Adjustment Platform – standardization of 6 degrees of freedom adjustment systems design and integration
Actuator,Alignment,Motion,Positioning
Cost-Effective High-Precision Magnetically Levitated Positioning Stage Technology
Control,Interferometry,Mechatronic,Servosystem
State space controller for actuator control of an active jerk decoupled feed drive
Actuator,Control,Drive,Vibration