Multi-axis exactly-constrained mirror stages with peltier cooling for high-flux hard X-ray nanofocusing
Cooling,Mechanism,Precision,Stiffness,Vacuum,X-ray
Cooling,Mechanism,Precision,Stiffness,Vacuum,X-ray
Accuracy,Control,Interferometry,Precision
Control,Magnetic bearing,Measurement,Positioning
Control,Design method,Feedback,Mechatronic
Bearing,Error,Modelling,Spindle
Accuracy,Engineering,Motion,Stability
Actuator,Development,Positioning,Ultra-precision