Combining Chromatic Confocal Microscopy and Spectral Interferometry into a single-shot high-precision multi-purpose measurement device
Interferometry,Metrology,Topography
Effects of subsurface scattering on the accuracy of optical 3D measurements using miniature polymer step gauges
Accuracy,Optical,Polymer,Scanning
Investigations of an Ultrastable Wavefront Interferometer Support Structure
Deposition,Modelling,Temperature,Vibration
Design and Control of a 3-DOF Reaction Force Compensation Mechanism for Precision Stage
Compensation,Positioning,Precision,Vibration
Control of contact resistance and frictional condition between cylindrical models for hydraulic half-floating sliding leadscrew
Control,Friction,Hydrostatic,Mechanism
Material characterization by deep rolling of laser deep alloyed micro-samples
Accuracy,Deformation,Laser,Rolling
Tool System for UV induced micro moulding of biomedical disposables
Biomedical,Injection,Micromachining,Molding (or Moulding)
Current Sampling in a Control Strategy for a Linear Motor of a 2D Nanopositioning Stage Based on Vector Control
Control,Motion,Positioning,Precision
Koopman-based model predictive control of a nanometric positioning system
Experimentation,Friction,Nonlinear,Positioning