2016

|2016

Thermal-elastic modelling of a complex system. Succesfully combining different modelling techniques

Calibration and validation of an integrated opto-thermo-mechanical model for thermal aberration predictions in EUV lithography

Cost-Effective, Agile Temperature Control–the Missing Link in Precision Manufacturing

Robust prediction of machine tool thermal error using ANFIS-based modelling, fusing temperature and displacement measurement

Reducing thermal errors with topology optimization and distributed cooling

Characterizing the Temperature Measuring Capabilities at the PTB-Sphere Interferometer II

Compensating the Thermal Displacements of a Feed Drive with Ball Screw

Temperature compensation of length measurements: determination of the apparent coefficient of thermal expansion on polymer parts

Alternative Cooling Fluids for EUV Lithography Systems

Cutting process impact on machine tool thermal errors

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