Improved measurement electronics for temperature measurement and control

Alternative Cooling Fluids for EUV Lithography Systems

Reduction of Thermally Induced TCP Displacement with Structural Strain Measurements

Cutting process impact on machine tool thermal errors

Prediction of Thermal Losses and Thermal Contact Resistance for Machine-Tool Components

Volumetric Measurement of Five-axis Machine Tool Thermal Deformation Using an MT-Check Probe

Thermal-elastic modelling of a complex system. Succesfully combining different modelling techniques

Calibration and validation of an integrated opto-thermo-mechanical model for thermal aberration predictions in EUV lithography

Online Compensation of Thermal Errors in Machine Tools using Temperature Field Observer

Cost-Effective, Agile Temperature Control–the Missing Link in Precision Manufacturing

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