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spen
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2012
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2012
Development of a state-of-the-art nm-measurement system for square meter sized lithography masks
euspen
2018-04-04T14:05:16+00:00
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Scanning measurement of step height and freeform surface by using optically trapped microsphere
euspen
2018-04-04T14:05:17+00:00
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Model Based Error Correction for Optical Aberrations in Laser Scanning Microscopes
euspen
2018-04-04T14:05:19+00:00
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New reference object for metrological performance testing of industrial CT systems
euspen
2018-04-04T14:05:19+00:00
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Design and construction of six-degree-of-freedom motion error measurement system in a linear stage using angle sensor-combined grating interferometry
euspen
2018-04-04T14:05:19+00:00
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A micro-scanning probe microscope-head with integrated interferometric fiber optic displacement sensor
euspen
2018-04-04T14:05:19+00:00
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Optical Absolute Position Measurement on Rough and Unprepared Technical Surfaces
euspen
2018-04-04T14:05:20+00:00
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Application of a novel fibre-coupled confocal sensor in a nanopositioning and nanomeasuring machine
euspen
2018-04-04T14:05:20+00:00
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The assessment of areal surface texture parameters for characterizing the adhesive bond strength of copper plated micro-machined glass
euspen
2018-04-04T14:05:20+00:00
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Advanced Integrated Machine Control for Fast Tool Assisted Ultra Precision Machining
euspen
2018-04-04T14:05:20+00:00
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