Uploaded: 4th June 2012
AuthorChabum LeeAuthor, Dong-Jin LeeAuthor, Gyu KimAuthor, Sun-Kyu Lee Download FileDesign and construction of six-degree-of-freedom motion error measurement system in a linear stage using angle sensor-combined grating interferometry
Home|Design and construction of six-degree-of-freedom motion error measurement system in a linear stage using angle sensor-combined grating interferometry