Development of a state-of-the-art nm-measurement system for square meter sized lithography masks euspen2018-04-04T14:05:16+00:00 Read More
Scanning measurement of step height and freeform surface by using optically trapped microsphere euspen2018-04-04T14:05:17+00:00 Read More
Model Based Error Correction for Optical Aberrations in Laser Scanning Microscopes euspen2018-04-04T14:05:19+00:00 Read More
New reference object for metrological performance testing of industrial CT systems euspen2018-04-04T14:05:19+00:00 Read More
Design and construction of six-degree-of-freedom motion error measurement system in a linear stage using angle sensor-combined grating interferometry euspen2018-04-04T14:05:19+00:00 Read More
A micro-scanning probe microscope-head with integrated interferometric fiber optic displacement sensor euspen2018-04-04T14:05:19+00:00 Read More
Optical Absolute Position Measurement on Rough and Unprepared Technical Surfaces euspen2018-04-04T14:05:20+00:00 Read More
Application of a novel fibre-coupled confocal sensor in a nanopositioning and nanomeasuring machine euspen2018-04-04T14:05:20+00:00 Read More
The assessment of areal surface texture parameters for characterizing the adhesive bond strength of copper plated micro-machined glass euspen2018-04-04T14:05:20+00:00 Read More
Advanced Integrated Machine Control for Fast Tool Assisted Ultra Precision Machining euspen2018-04-04T14:05:20+00:00 Read More
