Universal Adjustment Platform – standardization of 6 degrees of freedom adjustment systems design and integration
Actuator,Alignment,Motion,Positioning
Actuator,Alignment,Motion,Positioning
Actuator,Interferometry,Piezo-electric,Vacuum
Control,Interferometry,Mechatronic,Servosystem
Actuator,Control,Drive,Vibration
Distance,Interferometry,Measurement,Motion
Control,Model,Piezo-electric,Positioning
Control,Dynamic,Motion,Optimisation
Control,Magnetic bearing,Measurement,Positioning
Control,Design method,Feedback,Mechatronic