Hannover 2017

|Hannover 2017

Process chain for fabrication of anisotropic optical functional surfaces on polymer components

nanoimprint process for arrayed waveugide grating patterns in silicon photonics

Bringing metrology to high-speed Atomic Force Microscopy (AFM)

A comparison of reflectance properties on polymer micro structured functional surface

Subsurface structure defects beneath fracture area of reaction-bonded silicon carbide in ultra-precision grinding

Micro-milling tool wear monitoring through a novel method for burrs evaluation

Experimental investigation on the influence of detector misalignment on X-ray CT measurement accuracy

ITRS roadmap is pushing wafer handling to milli-Kelvin performance

Effect of tool coated with conductive and non-conductive layer on micro-EDM characteristic of Ni based X alloy

Feasibility study on integrated process/product quality assurance framework for precision injection moulding based on vibration monitoring

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