Exploring a compact piezo-driven inchworm motor for LISA space mission
Automation;Piezo-electric;Precision;Prototyping
Diamond;Force;Micromachining;Milling
Bearing;Dynamic;Spindle;Stiffness
In-process measurement;Manufacturing;Metrology
Inspection;Interferometry;Microscope;Optical
Alignment;Laser;Optical;Photonics
Acoustic;Electrical discharge machining (EDM);Monitoring