Special Interest Group Meeting: Precision Motion Systems & Control
17th – 18th November 2020

Programme

Please note that all times are shown in Central European Time (CET)

Tuesday 17^th November 2020

Time (CET)	Programme
09:00 – 10:30	Tutorial: Design concepts for sub-micrometer positioning (Part 1) Huub Janssen, JPE, NL
10:30 – 11:00	Coffee and networking
11:00 – 12:30	Tutorial: Design concepts for sub-micrometer positioning (Part 2)

Time (CET)	Programme
13:30 – 13:40	Welcome Address – euspen and Jens Flügge, PTB
13:40 – 14:10	Keynote: Mechatronic challenges in optical lithography Hans Butler, ASML, NL
14:10 – 15:30 Chair: Markus Hauf	Session 1: High dynamic positioning systems (Part 1) 14:10 Designing anti-aliasing-filters for control loops of mechatronic systems regarding the rejection of aliased resonances Ulrich Schönhoff, Carl Zeiss SMT GmbH, DE 14:30 A galvanometer based laser dynamic focusing system Zhen Zhang, Tsinghua University, CN 14:50 Flexure positioning stage based on delta technology for high precision and dynamic industrial machining applications Mikael Bianchi, SUPSI, CH 15:10 Mechanical shortcut localization for active vibration isolation systems Daniel Seitz, Carl Zeiss SMT GmbH, DE
15:30 – 15:40	Coffee and networking
15:40 – 16:20	Session 1: High dynamic positioning systems (Part 2) 15:40 Modeling and feedforward control for high performance galvanometer scanners Zhen Zhang, Tsinghua University, CN 16:00 Multivariable performance analysis of position-controlled payloads with flexible eigenmodes Luca Mettenleiter, Carl Zeiss SMT GmbH, DE
16:20 – 16:50	Coffee, debate and discussion on High dynamic positioning systems
16:50 – 17:30 Chair: Mario Di Castro	Session 2: Multi-axis positioning systems 16:50 High-precision motion system design by topology optimization considering additive manufacturing Arnoud Delissen, Delft University of Technology, NL 17:10 A multivariable experiment design framework for accurate FRF identification of complex systems Nic Dirkx, ASML, NL
17:30 – 18:00	Coffee, debate and discussion on Multi-axis positioning systems

Wednesday 18^th November 2020

Time (CET)	Programme
09:00 – 09:30	Keynote: High precision mechatronic approaches for advanced nanopositioning and nanomeasuring technologies Eberhard Manske, TU Ilmenau, DE
09:30 – 09:50 Chair: Jens Flügge	Session 3: Linear and angular position measurement systems 09:30 Development of a real-time auto focus microscope system for micro-stereolithography Yijie Liu, Tsinghua University, CH
09:50 – 10:10	Coffee, debate and discussion on Linear and angular position measurement systems
10:10 – 10:30	Coffee Break
10:30 – 11:50 Chair: Jens Flügge	Poster session Reducing control delay times to enhance dynamic stiffness of magnetic bearings Jan-Philipp Schmidtmann, Institute of Production Engineering and Machine Tools, DE PIRest technology – New experimental findings Jonas Reiser, Physikinstrumente (PI), DE Automatic validation device for single-axis high impact accelerometers Gerard Aliana Cervera, CERN, CH Position domain collaborative control with multirate sampling for a laser scanner-stage system Yue Cao, Tsinghua University, CH Non-linear position-varying control for an eccentric shaft Z-actuator with pre-tension Michiel Beijen, DEMCON Advanced Mechatronics, NL Disturbance observer-based antiwindup control for nanopositioning systems subjected to actuator saturations Peng Yan, Qilu University of Technology, CN Long-range piezo actuators: Compensating hysteresis and commutation angle reproducible disturbances Nard Strijbosch, Eindhoven University of Technology, NL Compensating position-dependent disturbances in mechatronic systems: a new repetitive control framework with applications to a substrate carrier Noud Mooren, Eindhoven University of Technology, NL Precision control for ten decades cross-scale subnanometer positioning and measuring machines Eberhard Manske, Technische Universität Ilmenau, DE
11:50 – 12:50	Lunch & networking
12:50 – 13:15	SOTA: Precision and proprioception in telerobotics Manuel Ferre, Centre for Automation and Robotics UPM-CSIC, ES
13:15 – 14:15 Chair: Mario Di Castro	Session 4: New approaches in position control algorithms 13:15 Learning for motion control in bonding machines: Bridging data-driven learning and physical modelling Maurice Poot, Eindhoven University of Technology, NL 13:35 Digital twins in control: From fault detection to predictive maintenance in precision mechatronics Koen Classens, Eindhoven University of Technology, NL 13:55 Advanced identification and control: Thermodynamics in precision mechatronics Enzo Evers, Eindhoven University of Technology, NL
14:15 – 14:45	Coffee, debate & discussion on New approaches in position control algorithms
14:45 – 14:55	Closing remarks by Jens Flügge, PTB, DE

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