Prof. Dr.-Ing habil. Eberhard Manske
TU Ilmenau, Germany
High precision mechatronic approaches for advanced nanopositioning and nanomeasuring technologies
Today, nanopositioning and nanometrology techniques are indispensable in many areas of nanotechnology, precision and ultra-precision manufacturing. These terms are often used in connection with piezo precision stages, without which the groundbreaking development of scanning probe microscopy would not have been possible. For more and more applications, however, the demand for nanoprecision must also be met in much larger measuring and working ranges of many millimeters.
In recent years, the TU Ilmenau has succeeded in developing nanopositioning and nanomeasuring machines for ranges of 25 mm x 25 mm x 5 mm to 200 mm x 200 mm x 20 mm with a resolution of 20 pm. The enormous accuracy is only achieved by the consistent application of error-minimized measuring principles and high-precision mechatronic approaches. In contrast to conventional concepts, high-precision fabrication of optical or mechanical functional surfaces of the measuring machines is contrasted with mechatronic measurement and control concepts.
This talk presents solutions and latest progress in the development and realization of high-precision positioning and measuring machines.
Eberhard Manske received the Diploma in Electrical Engineering from the Technische Universität Ilmenau in 1982. He obtained the Ph.D. degree in 1986, and the habilitation in 2006 in the field of precision measurement technology. Since 2008 he holds a professorship “Production and Precision Measurement Technology” at the Technische Universität Ilnmenau.
From 2008 to 2013 he was spokesman of the Collaborative Research Centre “Nanopositioning and Nanomeasuring Machines (SFB 622)” and since 2017 he leads the research training group “Tip- and laser-based 3D-Nanofabrication in extended macroscopic working areas (NanoFab)” funded by the German Research Council. His research activities focus on the development of nanopositioning and nanomeasuring machines, especially in the fields of high precision laser interferometry, laser stabilization, frequency comb technology, optical and tactile nanosensors and scanning probe techniques.